Goux, LudovicLudovicGouxLisoni, JuditJuditLisoniSchwitters, MichaelMichaelSchwittersParaschiv, VasileVasileParaschivMaes, D.D.MaesHaspeslagh, LucLucHaspeslaghWouters, DirkDirkWoutersMenou, M.M.MenouTurquat, Ch.Ch.TurquatMadigou, V.V.MadigouMuller, Ch.Ch.MullerZambrano, R.R.Zambrano2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10516Composition control and ferroelectric properties of sidewall Sr0.8Bi2.2Ta2O9 in integrated 3-Dimensional ferroelectric capacitorsProceedings paper