Atomic scale observation of atom distributions in 3D devices using atom probe tomography

Melkonyan, DavitDavitMelkonyan2021-10-272021-10-272019-10https://imec-publications.be/handle/20.500.12860/33570Atomic scale observation of atom distributions in 3D devices using atom probe tomographyPHD thesishttps://limo.libis.be/primo-explore/fulldisplay?docid=LIRIAS2850181&context=L&vid=Lirias&search_scope=Lirias&tab=default_tab&lang=en_US