Vantomme, AndreAndreVantommeWu, Ming FangMing FangWuWahl, U.U.WahlPattyn, HugoHugoPattynLangouche, H.H.LangoucheBender, HugoHugoBender2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1620Channeled ion beam synthesis: a new technique to form high-quality rare-earth silicidesOral presentation