Is the constant current charge-to-breakdown method still a good tool to measure oxide reliability

Nigam, TanyaTanyaNigamDegraeve, RobinRobinDegraeveGroeseneken, GuidoGuidoGroesenekenHeyns, MarcMarcHeyns2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2054Is the constant current charge-to-breakdown method still a good tool to measure oxide reliabilityMeeting abstract