Dynamics of the drying defects left by residual ultra-pure water droplets on silicon substrate

Belmiloud, NaserNaserBelmiloudTamaddon, Amir-HosseinAmir-HosseinTamaddonMertens, PaulPaulMertensStruyf, HerbertHerbertStruyfXu, XiuMeiXiuMeiXu2021-10-202021-10-2020122162-8769https://imec-publications.be/handle/20.500.12860/20349Dynamics of the drying defects left by residual ultra-pure water droplets on silicon substrateJournal article