Mechanisms of high-pressure tip-induced material removal toward a tomographic AFM

Celano, UmbertoUmbertoCelanoPandey, KomalKomalPandeyWouters, LennaertLennaertWoutersParedis, KristofKristofParedisvan der Heide, PaulPaulvan der HeideVandervorst, WilfriedWilfriedVandervorst2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30376Mechanisms of high-pressure tip-induced material removal toward a tomographic AFMMeeting abstracthttps://mrsspring2018.zerista.com/event/member/467955