Baklanov, MikhaïlMikhaïlBaklanovShamiryan, DenisDenisShamiryanTokei, ZsoltZsoltTokeiBeyer, GeraldGeraldBeyerConard, ThierryThierryConardVanhaelemeersch, SergeSergeVanhaelemeerschMaex, KarenKarenMaex2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5039Characterization of Cu surface cleaning by hydrogen plasmaJournal article