Kumar, ArulArulKumarGilbert, MatthieuMatthieuGilbertKambham, Ajay KumarAjay KumarKambhamGencarelli, FedericaFedericaGencarelliLoo, RogerRogerLooVandervorst, WilfriedWilfriedVandervorst2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22623Application of atom probe tomography to epitaxial layersProceedings paper