Joint first principles and experimental investigation on the improved performance of the Ta₂O₅interface layer for an MoS₂/WS₂channel

Van Troeye, BenoitBenoitVan TroeyeYang, Shao-HengShao-HengYangLan, Hao-YuHao-YuLanZemlyanov, DmitryDmitryZemlyanovKar, Gouri SankarGouri SankarKarChen, ZhihongZhihongChenPourtois, GeoffreyGeoffreyPourtois2025-06-242025-06-242025-JUN 20003-6951WOS:001506885200003https://imec-publications.be/handle/20.500.12860/45835Joint first principles and experimental investigation on the improved performance of the Ta₂O₅interface layer for an MoS₂/WS₂channelJournal article10.1063/5.0266701WOS:001506885200003OXIDE THIN-FILMSTEMPERATURETANTALUM