Standard cell architectures for N2 node: transition from FinFET to NanoSheet and to ForkSheet device

Chehab, BilalBilalChehabWeckx, PieterPieterWeckxRyckaert, JulienJulienRyckaertJang, DoyoungDoyoungJangVerkest, DiederikDiederikVerkestSpessot, AlessioAlessioSpessot2023-01-182021-11-022023-01-1820210277-786XWOS:000671888300004https://imec-publications.be/handle/20.500.12860/37723Standard cell architectures for N2 node: transition from FinFET to NanoSheet and to ForkSheet deviceProceedings paper10.1117/12.2548573978-1-5106-3424-4WOS:000671888300004