Reactions mechanisms in Al2O3 atomic layer deposition studied by density functional theory

Delabie, AnneliesAnneliesDelabiePourtois, GeoffreyGeoffreyPourtoisSioncke, SonjaSonjaSionckeVan Elshocht, SvenSvenVan ElshochtPierloot, ChristineChristinePierloot2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20581Reactions mechanisms in Al2O3 atomic layer deposition studied by density functional theoryProceedings paper