Ray Chaudhuri, AsheshAsheshRay ChaudhuriHelin, PhilippePhilippeHelinvan den Hoven, RichardRichardvan den HovenSeveri, SimoneSimoneSeveriRottenberg, XavierXavierRottenbergYazicioglu, Refet FiratRefet FiratYaziciogluWitvrouw, AnAnWitvrouwFrancis, L.A.L.A.FrancisTilmans, HarrieHarrieTilmans2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25804CMOS integrated poly-SiGe MEMS accelerometer above 0.18 $lm technologyProceedings paperhttp://ieeexplore.ieee.org/xpl/abstractAuthors.jsp?arnumber=7180848