Polspoel, WouterWouterPolspoelFavia, PaolaPaolaFaviaMody, JayJayModyBender, HugoHugoBenderVandervorst, WilfriedWilfriedVandervorst2021-10-182021-10-1820090021-8979https://imec-publications.be/handle/20.500.12860/16035Physical degradation of gate dielectrics induced by local electrical stress using conductive atomic force microscopyJournal articlehttp://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JAPIAU000106000002024101000001&idtype=cvips&gifs=Yes