Silicon and selenium implantation and activation in In0.53Ga0.47As under low thermal budget conditions

Alian, AliRezaAliRezaAlianBrammertz, GuyGuyBrammertzWaldron, NiamhNiamhWaldronMerckling, ClementClementMercklingHellings, GeertGeertHellingsLin, DennisDennisLinWang, Wei-EWei-EWangMeuris, MarcMarcMeurisSimoen, EddyEddySimoenDe Meyer, KristinKristinDe MeyerHeyns, MarcMarcHeyns2021-10-192021-10-1920110167-9317https://imec-publications.be/handle/20.500.12860/18466Silicon and selenium implantation and activation in In0.53Ga0.47As under low thermal budget conditionsJournal article