One- and two-dimensional dopant/carrier profiling for ULSI

Vandervorst, WilfriedWilfriedVandervorstClarysse, TrudoTrudoClarysseDe Wolf, PeterPeterDe WolfTrenkler, ThomasThomasTrenklerHantschel, ThomasThomasHantschelStephenson, RobertRobertStephensonJanssens, TomTomJanssens2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/3091One- and two-dimensional dopant/carrier profiling for ULSIProceedings paper