Sol-gel growth of PZT on reactively sputtered RuO2 electrodes

Norga, GerdGerdNorgaFè, LauraLauraFèWouters, DirkDirkWoutersIing, S.S.IingMaes, HermanHermanMaes2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3708Sol-gel growth of PZT on reactively sputtered RuO2 electrodesOral presentation