Silicon surface roughening by the decomposition of hydrogen peroxide

Schmidt, HaraldHaraldSchmidtMeuris, MarcMarcMeurisMertens, PaulPaulMertensVerhaverbeke, StevenStevenVerhaverbekeHeyns, MarcMarcHeynsHellemans, L.L.HellemansSnauwaert, J.J.SnauwaertDillenbeck, C.C.Dillenbeck2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/491Silicon surface roughening by the decomposition of hydrogen peroxideProceedings paper