Vici, AndreaAndreaViciDegraeve, RobinRobinDegraeveKaczer, BenBenKaczerFranco, JacopoJacopoFrancoVan Beek, SimonSimonVan BeekDe Wolf, IngridIngridDe Wolf2022-03-082022-03-0820210038-1101WOS:000687335000001https://imec-publications.be/handle/20.500.12860/39383A multi-energy level agnostic simulation approach to defect generationJournal article10.1016/j.sse.2021.108056WOS:000687335000001DEPENDENT DIELECTRIC-BREAKDOWNULTRATHIN SILICON DIOXIDESUBSTRATE-HOT-ELECTRONTRAP GENERATIONTHIN GATEPHYSICSMODELSSIO2