Low-power optical beam steering by microelectromechanical waveguide gratings

Errando-Herranz, CarlosCarlosErrando-HerranzLe Thomas, NicolasNicolasLe ThomasGylfason, Kristinn B.Kristinn B.Gylfason2021-10-272021-10-272019-020146-9592https://imec-publications.be/handle/20.500.12860/32940Low-power optical beam steering by microelectromechanical waveguide gratingsJournal articlehttps://doi.org/10.1364/OL.44.000855