Dissolution rate monitor tool to measure EUV photoresist dissolution

Vesters, YannickYannickVestersDe Simone, DaniloDaniloDe SimoneDe Gendt, StefanStefanDe Gendt2021-10-242021-10-2420170914-9244https://imec-publications.be/handle/20.500.12860/29868Dissolution rate monitor tool to measure EUV photoresist dissolutionJournal article