A new approach for the calculation of line capacitances of two-layer IC interconnects

Ymeri, HasanHasanYmeriNauwelaers, BartBartNauwelaersMaex, KarenKarenMaexDe Roest, DavidDavidDe Roest2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4962A new approach for the calculation of line capacitances of two-layer IC interconnectsJournal article