De Gendt, StefanStefanDe GendtArnauts, SophiaSophiaArnautsWitters, ThomasThomasWittersBoehme, W.W.BoehmeGonchond, J. P.J. P.GonchondHuber, A.A.HuberLerche, J.J.LercheLoewenstein, LeeLeeLoewensteinRink, I.I.RinkWortelboer, R.R.WortelboerMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4253Vapor phase decomposition - droplet collection evalutation of a wafer surface preparation systemProceedings paper