Jo, GaehunGaehunJoEdinger, PierrePierreEdingerBleiker, Simon J.Simon J.BleikerWang, XiaojingXiaojingWangTakabayashi, Alain YujiAlain YujiTakabayashiSattari, HamedHamedSattariQuack, NielsNielsQuackJezzini, MoisesMoisesJezziniLee, Jun SuJun SuLeeVerheyen, PeterPeterVerheyenZand, ImanImanZandKhan, Muhammad UmarMuhammad UmarKhanBogaerts, WimWimBogaertsStemme, GoranGoranStemmeGylfason, Kristinn B.Kristinn B.GylfasonNiklaus, FrankFrankNiklaus2023-06-292023-06-202023-06-2920222327-9125WOS:000750609100001https://imec-publications.be/handle/20.500.12860/41890Wafer-level hermetically sealed silicon photonic MEMSJournal article10.1364/PRJ.441215WOS:000750609100001CAVITIES