Vereecke, GuyGuyVereeckeVos, RitaRitaVosHolsteyns, FrankFrankHolsteynsSchmidt, M.O.M.O.SchmidtBaeyens, MartienMartienBaeyensGomme, StevenStevenGommeSnow, JimJimSnowCoenen, V.V.CoenenMertens, PaulPaulMertensBauer, T.T.BauerHeyns, MarcMarcHeyns2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8367Influence of hardware and chemistry on the removal of nano-particles in a megasonic cleaning tankProceedings paper