Impact of ALD grown passivation layers on silicon nitride based integrated optic devices for very-near-infrared wavelengths

Khanna, AmitAmitKhannaSubramanian, AnanthAnanthSubramanianHayrinen, MarkusMarkusHayrinenSelvaraja, ShankarShankarSelvarajaVerheyen, PeterPeterVerheyenVan Thourhout, DriesDriesVan ThourhoutHonkanen, SeppoSeppoHonkanenLipsanen, HarriHarriLipsanenBaets, RoelRoelBaets2021-10-222021-10-222014-031094-4087https://imec-publications.be/handle/20.500.12860/24056Impact of ALD grown passivation layers on silicon nitride based integrated optic devices for very-near-infrared wavelengthsJournal articlehttp://www.opticsinfobase.org/oe/abstract.cfm?uri=oe-22-5-5684