Lattice expansion induced by Zn channeled implantation in GaN

Ding, F.R.F.R.DingHe, W.H.W.H.HeVantomme, AndreAndreVantommeZhao, Q.Q.ZhaoPipeleers, B.B.PipeleersJacobs, K.K.JacobsMoerman, IngridIngridMoerman2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6284Lattice expansion induced by Zn channeled implantation in GaNJournal article