Gencarelli, FedericaFedericaGencarelliVincent, BenjaminBenjaminVincentSouriau, LaurentLaurentSouriauRichard, OlivierOlivierRichardVandervorst, WilfriedWilfriedVandervorstLoo, RogerRogerLooCaymax, MattyMattyCaymaxHeyns, MarcMarcHeyns2021-10-202021-10-2020120040-6090https://imec-publications.be/handle/20.500.12860/20715Low-temperature Ge and GeSn chemical vapor deposition using Ge2H6Journal articlehttp://dx.doi.org/10.1016/j.tsf.2011.10.119