A Bottom-Up Volume Reconstruction Method for Atom Probe Tomography

Cools, SigfriedSigfriedCoolsLing, Yu TingYu TingLingBogdanowicz, JanuszJanuszBogdanowiczFleischmann, ClaudiaClaudiaFleischmannDe Beenhouwer, JanJanDe BeenhouwerSijbers, JanJanSijbersVandervorst, WilfriedWilfriedVandervorst2022-08-292022-04-112022-08-2920221431-9276WOS:000748119300001https://imec-publications.be/handle/20.500.12860/39612A Bottom-Up Volume Reconstruction Method for Atom Probe TomographyJournal article10.1017/S1431927621012836WOS:000748119300001PhysicsFIELD EVAPORATIONSPECIMENFINFETSSHAPESMEDLINE:35088688