De Wolf, PeterPeterDe WolfTrenkler, ThomasThomasTrenklerClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstHellemans, L.L.Hellemans2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1834ULSI-device characterization using nano-SRPProceedings paper