Popovici, Mihaela IoanaMihaela IoanaPopoviciKim, Min-SooMin-SooKimTomida, KazuyukiKazuyukiTomidaSwerts, JohanJohanSwertsTielens, HildeHildeTielensMoussa, AlainAlainMoussaRichard, OlivierOlivierRichardBender, HugoHugoBenderFranquet, AlexisAlexisFranquetConard, ThierryThierryConardAltimime, LaithLaithAltimimeVan Elshocht, SvenSvenVan ElshochtKittl, JorgeJorgeKittl2021-10-192021-10-1920110167-9317https://imec-publications.be/handle/20.500.12860/19600Improved EOT and leakage current for metal-insulator-metal capacitor stacks with rutile TiO2Journal articlehttp://dx.doi.org/10.1016/j.mee.2011.03.063