Carchon, GeertGeertCarchonDe Raedt, WalterWalterDe RaedtNauwelaers, BartBartNauwelaers2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5112Integration of CPW quadrature couplers in multilayer thin-film MCM-DJournal article