Electrical and physical characterization of high-k dielectric layers

Houssa, MichelMichelHoussaNaili, MohamedMohamedNailiAfanas'ev, V. V.V. V.Afanas'evHeyns, MarcMarcHeynsStesmans, AndreAndreStesmans2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5350Electrical and physical characterization of high-k dielectric layersProceedings paper