Quack, NielsNielsQuackTakabayashi, Alain YujiAlain YujiTakabayashiSattari, HamedHamedSattariEdinger, PierrePierreEdingerGylfason, Kristinn B.Kristinn B.GylfasonJo, GeahunGeahunJoNiklaus, FrankFrankNiklausVerheyen, PeterPeterVerheyenJezzini, MoisesMoisesJezziniKhan, Muhammad UmarMuhammad UmarKhanZand, ImanImanZandBogaerts, WimWimBogaerts2023-01-172022-11-072023-01-1720212374-0140WOS:000866488100167https://imec-publications.be/handle/20.500.12860/40688Scalable Nano-Opto-Electromechanical Systems in Silicon PhotonicsProceedings paper10.1109/IPC48725.2021.9593009978-1-6654-1601-6WOS:000866488100167