Sequential infiltration synthesis for pattern transfer of sub 20 nm thermal scanning probe lithography patterns

Spiesser, MartinMartinSpiesserKulmala, TeroTeroKulmalaChan, BTBTChande Marneffe, Jean-FrancoisJean-Francoisde MarneffeKnoll, ArminArminKnoll2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31839Sequential infiltration synthesis for pattern transfer of sub 20 nm thermal scanning probe lithography patternsMeeting abstracthttps://ald2018.avs.org/