Ghannam, MoustafaMoustafaGhannamHassan, Mostafa MedhatMostafa MedhatHassanDepauw, ValerieValerieDepauwBeaucarne, GuyGuyBeaucarnePoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12189Impact of temperature and position dependent residual stress in porous silicon on the final pore shape after high temperature annealingProceedings paper