Cotrin Teixeira, RicardoRicardoCotrin TeixeiraTorfs, TomTomTorfsDe Munck, KoenKoenDe MunckDe Moor, PietPietDe MoorBaert, KrisKrisBaertVan Hoof, ChrisChrisVan Hoof2021-10-162021-10-162007-12https://imec-publications.be/handle/20.500.12860/11908Die level thinning down to 15μm thicknessProceedings paper