Dhayalan, Sathish KumarSathish KumarDhayalanKujala, JiriJiriKujalaSlotte, JonatanJonatanSlottePourtois, GeoffreyGeoffreyPourtoisSimoen, EddyEddySimoenRosseel, ErikErikRosseelHikavyy, AndriyAndriyHikavyyShimura, YosukeYosukeShimuraIacovo, SerenaSerenaIacovoStesmans, AndreAndreStesmansLoo, RogerRogerLooVandervorst, WilfriedWilfriedVandervorst2021-10-232021-10-2320160003-6951https://imec-publications.be/handle/20.500.12860/26557On the manifestation of phosphorus-vacancy complexes in epitaxial Si:P filmsJournal articlehttp://scitation.aip.org/content/aip/journal/apl/108/8/10.1063/1.4942605