Integration HSQ into direct-on-metal approach for 0.25µm technology

Gao, TengTengGaoWitvrouw, AnnAnnWitvrouwCoenegrachts, BartBartCoenegrachtsBruynseraede, ChristopheChristopheBruynseraedeVan Hove, MarleenMarleenVan HoveMaex, KarenKarenMaex2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3461Integration HSQ into direct-on-metal approach for 0.25µm technologyOral presentation