Minimizing the Size of Force-Controlled Point-Contacts on Silicon for Carrier Profiling

Snauwaerts, JanJanSnauwaertsBlanc, N.N.BlancDe Wolf, PeterPeterDe WolfHellemans, L.L.Hellemans2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/893Minimizing the Size of Force-Controlled Point-Contacts on Silicon for Carrier ProfilingOral presentation