Moiré effect-based Overlay target design for OPO improvements

Van Den Heuvel, DieterDieterVan Den HeuvelLeray, PhilippePhilippeLerayHajaj, E.E.HajajShaphirov, D.D.ShaphirovAshwal, E.E.AshwalDror, C.C.DrorYohanan, R.R.YohananGhinovker, M.M.GhinovkerGordon, K.K.GordonLiu, Z.Z.LiuLiu, X.X.LiuGronheid, RoelRoelGronheidSpielberg, H.H.Spielberg2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/37279Moiré effect-based Overlay target design for OPO improvementsProceedings paper