Christiaens, IlseIlseChristiaensRoelkens, G.G.RoelkensDe Mesel, K.K.De MeselVan Thourhout, D.D.Van ThourhoutBaets, RoelRoelBaets2021-10-162021-10-162005-02https://imec-publications.be/handle/20.500.12860/10223Thin-film devices fabricated with benzocyclobutene adhesive wafer bondingJournal article