Integration of a templated DSA based hole shrink in a short loop via chain

Rincon Delgadillo, PaulinaPaulinaRincon DelgadilloChan, BTBTChanDoise, JanJanDoisevan der Veen, MarleenMarleenvan der VeenHeylen, NancyNancyHeylenDemuynck, StevenStevenDemuynckBoemmels, JuergenJuergenBoemmelsGronheid, RoelRoelGronheid2021-10-232021-10-2320161932-5150https://imec-publications.be/handle/20.500.12860/27217Integration of a templated DSA based hole shrink in a short loop via chainJournal articlehttp://spie.org/publications/journal/10.1117/1.JMM.15.4.043505