Intrinsic effect of porosity on the stiffness and fracture energy of nano porous ultra low-k dielectrics

Vanstreels, KrisKrisVanstreelsWu, ChenChenWuVerdonck, PatrickPatrickVerdonckSchneider, DieterDieterSchneiderGonzalez, MarioMarioGonzalezMartini, RobertoRobertoMartiniBaklanov, MikhaïlMikhaïlBaklanov2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23309Intrinsic effect of porosity on the stiffness and fracture energy of nano porous ultra low-k dielectricsMeeting abstract