Neumann, Jens TimoJens TimoNeumannSrikantha, AbhilashAbhilashSrikanthaHuthwohl, PhilippPhilippHuthwohlLee, KeumsilKeumsilLeeWilliam, James B.James B.WilliamKorb, ThomasThomasKorbFoca, EugenEugenFocaGarbowski, TomaszTomaszGarbowskiBoecker, DanielDanielBoeckerDas, SayantanSayantanDasHalder, SandipSandipHalder2023-04-272022-09-082023-04-272022978-1-5106-4981-10277-786XWOS:000844549800017https://imec-publications.be/handle/20.500.12860/40389Defect detection and classification on imec iN5 node BEoL test vehicle with MultiSEMProceedings paper10.1117/12.2619766978-1-5106-4982-8WOS:000844549800017