De Smedt, FrankFrankDe SmedtDe Gendt, StefanStefanDe GendtClaes, M.M.ClaesHeyns, MarcMarcHeynsVankerckhoven, HansHansVankerckhovenVinckier, ChrisChrisVinckier2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5203The increasing importance of the use of ozone in micro-electronics industryOral presentation