Collaert, NadineNadineCollaertDe Keersgieter, AnAnDe KeersgieterKottantharayil, AnilAnilKottantharayilRooyackers, RitaRitaRooyackersEneman, GeertGeertEnemanGoodwin, MichaelMichaelGoodwinEyckens, BrendaBrendaEyckensSleeckx, ErikErikSleeckxde Marneffe, Jean-FrancoisJean-Francoisde MarneffeDe Meyer, KristinKristinDe MeyerAbsil, PhilippePhilippeAbsilJurczak, GosiaGosiaJurczakBiesemans, SergeSergeBiesemans2021-10-162021-10-162005-11https://imec-publications.be/handle/20.500.12860/10245Performance improvement of tall triple gate devices with strained SiN layersJournal article