Verifying thermal/thermo-mechanical behavior of a 3D stack

Marchal, PolPolMarchalVan der Plas, GeertGeertVan der PlasLimaye, PareshPareshLimayeMercha, AbdelkarimAbdelkarimMerchaCherman, VladimirVladimirChermanOprins, HermanHermanOprinsLabie, RietRietLabieVandevelde, BartBartVandeveldeTravaly, YoussefYoussefTravalyBeyne, EricEricBeyne2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17570Verifying thermal/thermo-mechanical behavior of a 3D stack – challenges and solutionsProceedings paper