D'Urzo, LuciaLuciaD'UrzoUmeda, T.T.UmedaMizuno, T.T.MizunoHattori, A.A.HattoriVaranasi, R.R.VaranasiSingh, A.A.SinghBeera, R.R.BeeraFoubert, PhilippePhilippeFoubertVandereyken, JelleJelleVandereykenDrent, WautWautDrent2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/35080Defectivity modulation in EUV resists through advanced filtration technologiesProceedings paperhttps://doi.org/10.1117/12.2560144