Saito, Shin-ichiShin-ichiSaitoShimamoto, YasuhiroYasuhiroShimamotoTorii, KazuyoshiKazuyoshiToriiManabe, YukikoYukikoManabeCaymax, MattyMattyCaymaxMaes, JanJanMaesHiratani, MasahikoMasahikoHirataniKimura, Shin-ichiroShin-ichiroKimura2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6785Mobility reduction due to remote charge scattering in Al2O3/SiO2 gate-stacked MISFETsProceedings paper