De Witte, JasperJasperDe WitteCuyvers, StijnStijnCuyversPoelman, StijnStijnPoelmanKuyken, BartBartKuykenVan Thourhout, DriesDriesVan Thourhout2023-01-192022-11-072023-01-1920212374-0140WOS:000866488100157https://imec-publications.be/handle/20.500.12860/40693Realization of Fabrication-Tolerant Si3N4-Si Mode TransformersProceedings paper10.1109/IPC48725.2021.9592999978-1-6654-1601-6WOS:000866488100157